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Chemical Solution Supply Device Product List

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Medication supply device (canister unit) P82

This is a device for storing concentrated solutions of 2 acidic and 1 alkaline liquid, and supplying the concentrated solutions through pressurized delivery using N2.

It is used for supplying concentrated liquid to CMP equipment. 【Features】 ■ Uses PTFE valves ■ Built-in exhaust damper * For more details about the product, please refer to the "PDF Download" button below. * Feel free to contact us with any inquiries.

  • Other semiconductor manufacturing equipment

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Medication Supply Device (Continuous Type) P112

Continuous supply of chemical solution to the process equipment.

This device is designed to supply a predetermined concentration of chemical solution to a process device. 【Specifications】 ○External dimensions: W1720*D810*H2010 ○Weight: Approximately 800kg This device is designed to supply a predetermined concentration of chemical solution to a process device. It can supply a maximum of two types of chemical solutions through two systems. Details regarding operation, such as dilution concentration and supply volume, can be tailored to your requirements.

  • Other physicochemical equipment

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